JPH0622914Y2 - イオン注入機のソース部ベーパライザ - Google Patents
イオン注入機のソース部ベーパライザInfo
- Publication number
- JPH0622914Y2 JPH0622914Y2 JP14851589U JP14851589U JPH0622914Y2 JP H0622914 Y2 JPH0622914 Y2 JP H0622914Y2 JP 14851589 U JP14851589 U JP 14851589U JP 14851589 U JP14851589 U JP 14851589U JP H0622914 Y2 JPH0622914 Y2 JP H0622914Y2
- Authority
- JP
- Japan
- Prior art keywords
- heating body
- sample chamber
- sample
- flange
- ion implanter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000006200 vaporizer Substances 0.000 title claims description 13
- 238000010438 heat treatment Methods 0.000 claims description 33
- 239000000523 sample Substances 0.000 description 40
- 238000004519 manufacturing process Methods 0.000 description 12
- 238000005468 ion implantation Methods 0.000 description 5
- 238000005219 brazing Methods 0.000 description 2
- 238000009529 body temperature measurement Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14851589U JPH0622914Y2 (ja) | 1989-12-22 | 1989-12-22 | イオン注入機のソース部ベーパライザ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14851589U JPH0622914Y2 (ja) | 1989-12-22 | 1989-12-22 | イオン注入機のソース部ベーパライザ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0386558U JPH0386558U (en]) | 1991-09-02 |
| JPH0622914Y2 true JPH0622914Y2 (ja) | 1994-06-15 |
Family
ID=31694960
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14851589U Expired - Lifetime JPH0622914Y2 (ja) | 1989-12-22 | 1989-12-22 | イオン注入機のソース部ベーパライザ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0622914Y2 (en]) |
-
1989
- 1989-12-22 JP JP14851589U patent/JPH0622914Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0386558U (en]) | 1991-09-02 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |